A thesis entitled sputter deposition of iron oxide and tin oxide based films and the fabrication of metal alloy based electrodes for solar hydrogen production by daniel sporar submitted as partial fulfillment of the requirements for the master of science degree in chemical engineering. Sputter deposition of complex alloy thin films phd thesis, b braeckman december 2016 modeling the reactive magnetron sputter process phd thesis, k strijckmans september 2015 dual magnetron sputter deposition of yttria- stabilized zirconia thin films phd thesis, js lamas march 2014 magnetrons, reactive. This thesis is based on the following articles, which are referred to in the text by their roman numerals i liljeholm l, nyberg t, kubart t, roos a, berg s (2010) re- active sputtering of sio2–tio2 thin film from composite six/tio2 targets vacuum 85(2):317-321 ii kubart t, trinh d, liljeholm l, hultman l, högberg h, ny. A microplasma-based sputtering system for direct-write, microscale fabrication of thin-film metal structures by edwin dudley burwell iv submitted in partial fulfillment of the requirements for the degree of master of science thesis advisor: professor christian a zorman. Rf magnetron sputtering of transparent conducting oxides and cdte/cds solar cells treharne, robert,edward (2011) rf magnetron sputtering of transparent conducting oxides and cdte/cds solar cells doctoral thesis, durham university.
Case oxygen, originates from a gaseous component, in this thesis o2, and can be incorporated in the growing films through various mechanisms therefore, reactive sputter deposition can be considered as a mixed physical and chemical process further, the magnetron sputtering is achieved by the use of a magnetic field. 1 university of tartu faculty of science and technology institute of chemistry inga põldsalu an afm study of reactive sputter-deposited oxide films used as solid support for lipid nanotubes networks master's thesis supervisors: phd student irep gözen dr urmas johanson associate professor uno mäeorg. The thesis introduced magnetron configuration and dummy ss rfq model in the srfq sputtering study in order to get an uniformly distributed sputter-coated niobium film on the entire surface of the complicated rfq electrode, a lot of film thickness simulations and experimental sputtering studies with stainless steel and.
Production and deposition of copper clusters using magnetron sputtering thesis by jonas daugaard hulstrøm aalborg university, skjernvej 4a, dk-9220 aalborg øst supervised by vladimir popok and muhammad hanif aalborg university, skjernvej 4a, dk-9220 aalborg øst abstract the aim of the project was to. To enhance the performance and durability of mechanical components, surface properties need to be modified in this work, a unique combination of transition metal carbide (tmc) multilayer coatings (tic/crc, tic/zrc and tic/wc) were deposited by reactive dc magnetron sputtering on 316ln steel substrates gixrd. This study explored the sputtering methods of thin-film multilayers to form dichroic mirrors in the visible spectrum for future solar-cell applications thesis: sb, massachusetts institute of technology, department of materials science and engineering, 2015 cataloged from pdf version of thesis includes bibliographical.
In this thesis, in-line vacuum, sputtering-based processes for the fabrication of complete thin film chalcogenide solar cells on stainless steel substrates are studied cigs absorbers are deposited in a one-step high-temperature process using compound targets czts precursors are first deposited by room temperature. Submitted my me thesis, our department received a brand-new sputtering system, capable of dc and rf sputtering preliminary sputtering experiments were performed more questions than answers remained how can d33 be maximised how can pl be maximised how do the two properties interact how can these.
Antistatic applications: metal coated fibers by magnetron sputtering a thesis submitted to the graduate school of engineering and sciences of i̇zmir institute of technology in partial fulfillment of the requirements for the degree of master of science in physics by. To the graduate council: i am submitting herewith a thesis written by devin alan roberts entitled magnetron sputtering and corrosion of ti-al-c and cr-al-c coatings for zr-alloy nuclear fuel cladding i have examined the final electronic copy of this thesis for form and content and recommend that it be accepted in partial. Abstract the sputtering of metals by low-energy (kev) ion bombardment has been investigated with the molecular dynamics technique this study, based on computer simulations, aims to elucidate experimental observations and to provide valuable theoretical insight the systems studied include ar+ ion bombardment of. 11 13 thesis outline the overall goal of this research is to contribute to the understanding of the fundamental atomistic mechanisms of film growth, structure formation and phase composition under plasma sputtering deposition conditions the outline of our work is as follows: chapter 2 begins with the.
Among the pvd methods, sputtering has been focused upon in the present thesis, since all the samples studied in the thesis were deposited using this technique although there are many variants of the technique, sputtering can again be broadly divided into dc magnetron and rf magnetron types in magnetron sputtering. The electric field inside a sputtering chamber accelerates electrons which collide with ar atoms producing ar+ ions and more electrons and a characteristic purple/ blue plasma these charge particles are then accelerated by the electric field: the electrons towards the anode and the ar+ ions towards the cathode (ito target.
Growth characterization of rf magnetron sputtered bifeo3 on epitaxial srtio3 thesis presented to the graduate council of texas state university-san marcos in partial fulfillment of the requirements for the degree master of science by rye a johnson, bs san marcos. In this work, zinc oxide (zno) thin films are fabricated by rf magnetron sputtering method the working of this thesis i would also like to thank prof dr peter wellmann for his careful co- examination on this thesis i would also like to thank the head of the technology department at the fraunhofer iisb, dr. You are about to start reading my phd thesis entitled plasma diagnostics focused on new magnetron sputtering devices for thin film deposition it deals with pro- cesses concerning sputtered particles in a deposition reactor a magnetron cath- ode is sputtered and acts as a source of metal particles these particles are ion.
Abstract of thesis antibacterial effects of sputter deposited silver-doped hydroxyapatite thin films over recent years, researchers have studied innovative ways to increase the lifespan of orthopedic implants in order to meet the soaring demand of hip and knee replacements since many of. C venkatasubramanian, “ preparation, characterization and post-deposition modification of pulsed-dc magnetron sputtered vanadium oxide thin films for microbolometer applications,” phd thesis ( the pennsylvania state university, 2010) google scholar 11 h a basantani, s kozlowski, m-y lee, j li, e c dickey. Iceland telephone: 525 4000 bibliographic information: davíð örn þorsteinsson , 2018, growth of hfn thin films by reactive high power impulse magnetron sputtering, msc thesis, faculty of physical sciences, university of iceland printing: háskólaprent, fálkagata 2, 107 reykjavík reykjavik, iceland, february 2018.